Chemical modification of PMIPK resist.
- Chemical modification of PMIPK resist.
- poly(methyl isopropenyl ketone) [PMIPK]; PMIPK-oxime; photosensitizer; photosensitivity; photodegradation; side-chain modification; polymer reaction; photoresist
- Issue Date
- Polymers for microelectronics-science and technology
- , 269-281
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- KIST Publication > Article
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