KIST Library Institutional Repository

반도체 메모리 소자용 커패시터 산화물 전극 제조법

Author

조철진; 김상태; 백승협; 김성근; 최지원; 김진상; 강종윤

Assignee

한국과학기술연구원

Regitration Date

2018-08-22

Registration No.

10-1892632

Application Date

2017-03-09

Application No.

2017-0030046

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/86167

Appears in Collections:

KIST Patent > 2017

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