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dc.contributor.author백승협-
dc.contributor.author길태현-
dc.contributor.author이기석-
dc.contributor.author최원준-
dc.contributor.author백정민-
dc.contributor.author김상현-
dc.date.accessioned2024-01-12T12:00:32Z-
dc.date.available2024-01-12T12:00:32Z-
dc.date.issued2019-11-26-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/86168-
dc.title마이크로 볼로미터를 위한 바나듐 산화물 박막 제조 방법-
dc.typePatent-
dc.date.registration2019-11-26-
dc.date.application2019-06-25-
dc.identifier.patentRegistrationNumber10488263-
dc.identifier.patentApplicationNumber16/451736-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2019
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