실리콘 Thermopile 집적센서의 기술동향

Title
실리콘 Thermopile 집적센서의 기술동향
Authors
주병권김형곤오명환
Keywords
MEMS; micromachining; microsensor; thermopile sensor; sensor
Issue Date
1989-12
Publisher
전자공학회지
Citation
VOL 16, NO 6, 546-555
URI
http://pubs.kist.re.kr/handle/201004/8641
ISSN
1016-9288
Appears in Collections:
KIST Publication > ETC
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