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dc.contributor.author김재훈-
dc.contributor.author박종민-
dc.contributor.author송길훈-
dc.contributor.author구교욱-
dc.contributor.author배정용-
dc.contributor.author김우영-
dc.contributor.author최진영-
dc.date.accessioned2024-01-12T12:32:33Z-
dc.date.available2024-01-12T12:32:33Z-
dc.date.issued2013-11-07-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/86822-
dc.title기판건조장치 및 기판건조방법-
dc.typePatent-
dc.date.registration2013-11-07-
dc.date.application2011-12-07-
dc.identifier.patentRegistrationNumber10-1329317-
dc.identifier.patentApplicationNumber10-2011-0130298-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2011
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