고품질 박막 증착을 위한 화학적 기판처리 방법 및 이를 이용한 박막형 열전소재의 제조방법

Author
김진상윤석진권성도김현재김정훈정대용
Assignee
한국과학기술연구원
Regitration Date
2009-02-05
Registration No.
10-0883332
Application Date
2007-05-23
Application No.
10-2007-0050002
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/87314
Appears in Collections:
KIST Patent > 2007
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