KIST Library Institutional Repository

실리콘 나노 입자를 포함하는 다층 구조의 실리콘화합물 박막 및 그 제조방법

Author

이태경; 박용주

Assignee

한국과학기술연구원

Regitration Date

2006-03-28

Registration No.

0567395

Application Date

2004-05-06

Application No.

2004-0031889

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/87454

Appears in Collections:

KIST Patent > 2004

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