Microstructure-dependent ferroelectric properties of SrBi//2Ta//2O//9 thin films fabricated by radio frequency magnetron sputtering

Title
Microstructure-dependent ferroelectric properties of SrBi//2Ta//2O//9 thin films fabricated by radio frequency magnetron sputtering
Authors
조광준이전국정형진박종완
Keywords
ferroelectric
Issue Date
1998-05
Publisher
Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
Citation
VOL 16, NO 3, 1258-1261
URI
http://pubs.kist.re.kr/handle/201004/8749
ISSN
0734-2101
Appears in Collections:
KIST Publication > Article
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