Laser direct etching of Al//0//.//3Ga//0//.//7As/GaAs multilayer structures.

Title
Laser direct etching of Al//0//.//3Ga//0//.//7As/GaAs multilayer structures.
Authors
박세기민병돈김성일김은규민석기이천안병성
Keywords
알곤이온 레이저
Issue Date
1997-05
Publisher
응용물리; The Korean physical society
Citation
v. 10, no. 3, 266-271
URI
http://pubs.kist.re.kr/handle/201004/8756
Appears in Collections:
KIST Publication > Article
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