Cross sectional analysis of laser etched groove on AlGaAs/GaAs multilayers.

Title
Cross sectional analysis of laser etched groove on AlGaAs/GaAs multilayers.
Authors
김성일민석기박세기김은규이천
Keywords
MOCVD
Issue Date
1996-01
Publisher
Bulletin of the Korean physical society
Citation
v. 14, no. 1, 239-?
URI
http://pubs.kist.re.kr/handle/201004/8764
Appears in Collections:
KIST Publication > Article
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