Intrinsic stress in chemical vapor deposited diamond films: an analytical model for the plastic deformation of the Si substrate

Title
Intrinsic stress in chemical vapor deposited diamond films: an analytical model for the plastic deformation of the Si substrate
Authors
정중현권동일이욱성백영준
Keywords
intrinsic stress
Issue Date
2001-08
Publisher
Journal of applied physics
Citation
VOL 90, NO 3, 1227-1236
URI
http://pubs.kist.re.kr/handle/201004/8793
ISSN
0021-8979
Appears in Collections:
KIST Publication > Article
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