KIST Library Institutional Repository

레이저　리소그라피　장비를　이용한　네가티브　마스크　제작방법

Author

박경현; 김선호; 최상삼; 김동환; 변영태

Assignee

한국과학기술연구원

Regitration Date

1997-04-22

Registration No.

114555

Application Date

1993-06-19

Application No.

93-11279

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/87947

Appears in Collections:

KIST Patent > Others

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