Fabrication and characterization of suspended-type thin film resonator using SOI-micromachining process

Title
Fabrication and characterization of suspended-type thin film resonator using SOI-micromachining process
Authors
주병권김현호이시형이전국김수원
Keywords
thin film resonator; soi
Issue Date
2001-06
Publisher
전기학회논문지; Transactions of the Korean Institute of Electrical Engneers
Citation
VOL 50, NO 6, 303-306
Abstract
STFR were fabricated on the floating membrane which was formed by SOI-micromachining process. The floating membranes having a thickness range of $3{\sim}15{\mu}m$ could be simply formed by micromachining the directly-bonded and thinned SOI substrate. The STFR device fabricated on the $15{\mu}m$-thick membrane showed resonance frequency of fr = 1.65 GHz, coupling coefficient of Keff2 = 2.4 %, and series and parallel quality factors of Qs = 91.7 and Qp = 87.7, respectively.
URI
http://pubs.kist.re.kr/handle/201004/8811
ISSN
0254-4172
Appears in Collections:
KIST Publication > Article
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