고분자 기판 위의 인듐산화물 또는 인듐주석산화물 박막증착 방법

Author
고석근조준식백영환한영건
Assignee
한국과학기술연구원
Regitration Date
2004-09-07
Registration No.
6,787,441
Application Date
2002-11-13
Application No.
10/182,986
Country
US
URI
https://pubs.kist.re.kr/handle/201004/88127
Appears in Collections:
KIST Patent > 2002
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