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dc.contributor.author우경자-
dc.contributor.author최광진-
dc.contributor.author조영상-
dc.contributor.author심상준-
dc.date.accessioned2024-01-12T13:37:02Z-
dc.date.available2024-01-12T13:37:02Z-
dc.date.issued2002-10-31-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/88150-
dc.title휘발성 베타-디(알콕시시카르보닐)레이트의 유기 금속 전구체 및 이를 이용한 산화금속 박막의 제조 방법-
dc.typePatent-
dc.date.registration2002-10-31-
dc.date.application2000-05-20-
dc.identifier.patentRegistrationNumber361015-
dc.identifier.patentApplicationNumber00-27276-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2000
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