Plasma polymerization of organosilicon compounds. 3. Overall kinetics of plasma polymer deposition.

Title
Plasma polymerization of organosilicon compounds. 3. Overall kinetics of plasma polymer deposition.
Authors
김낙중김은영홍성일Hiroyuki Sasabe박수영
Keywords
plasma polymerization; plasma deposition; glow discharge; organosilicon
Issue Date
1992-01
Publisher
폴리머; Polymer
Citation
v. 16, no. 3, 260-?
URI
http://pubs.kist.re.kr/handle/201004/8816
Appears in Collections:
KIST Publication > Article
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