Defect states in silicon after laser processing.

Title
Defect states in silicon after laser processing.
Authors
김성일민석기최원철김은규조훈영김춘근
Keywords
silicon; defect; laser
Issue Date
1991-01
Publisher
Bull. Korean phys. soc.
Citation
v. 9, no. 1, 66-?
URI
http://pubs.kist.re.kr/handle/201004/8857
Appears in Collections:
KIST Publication > Conference Paper
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