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Actinic EUV Mask Inspection using Coherent EUV Light from High Harmonic Generation

Authors

MOON BYUNGHYUCK; Yong Soo Kim; Kim, Yong Tae; Hamin Sung; Jomsool Kim; Byeong-Kwon Ju; Jhon, Young Min

Publisher

11.8~11, 교토

Citation

International Microprocesses and Nanotechnology Conference 2016, v.11P-11-1

Keywords

EUV; High Harmonic Generation; Mask Inspection

URI

https://pubs.kist.re.kr/handle/201004/88854

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KIST Conference Paper > Others

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