KIST Library Institutional Repository

III-V족 화합물의 면방향 의존성을 이용한 에피택셜 리프트오프에 의한 반도체 소자의 제조 방법

Author

김상현; 김성광; 심재필; 김형준

Assignee

한국과학기술연구원

Regitration Date

2018-04-10

Registration No.

9941168

Application Date

2017-06-23

Application No.

15/631309

Country

US

URI

https://pubs.kist.re.kr/handle/201004/89106

Appears in Collections:

KIST Patent > 2017

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML