DSpace at KISTKIST Conference PaperOthers

Full metadata record

DC Field Value Language
dc.contributor.author박한용-
dc.contributor.author김용수-
dc.contributor.author성하민-
dc.contributor.author김점술-
dc.contributor.author이승범-
dc.contributor.author조현우-
dc.contributor.author이주한-
dc.contributor.authorKim, Yong Tae-
dc.contributor.authorJhon, Young Min-
dc.date.accessioned2024-01-12T14:34:07Z-
dc.date.available2024-01-12T14:34:07Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/89318-
dc.languageEnglish-
dc.publisher4.6~8, 코엑스, 한국광학회-
dc.subjectEUV-
dc.subjectCSM-
dc.titleCSM(Coherent Scattering Microscope) system development for next generation EUV photomask inspection-
dc.title.alternative차세대 EUV 반도체 포토마스크 검사를 위한 CSM(Coherent Scattering Microscope) 시스템 개발-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation차세대 리소그래피 학술대회, no.F2-IV-2, pp.119 - 120-
dc.citation.title차세대 리소그래피 학술대회-
dc.citation.numberF2-IV-2-
dc.citation.startPage119-
dc.citation.endPage120-
dc.citation.conferencePlaceKO-
Appears in Collections:
KIST Conference Paper > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE