레이저 리프트 오프 방법을 이용한 산화물 박막 평면 소자의 제조 방법

Author
강종윤윤석진도영호백승협최지원송현철김진상
Assignee
한국과학기술연구원
Regitration Date
2013-11-29
Registration No.
10-1337515
Application Date
2012-06-13
Application No.
2012-0063205
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/89691
Appears in Collections:
KIST Patent > 2012
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