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dc.contributor.author문명운-
dc.contributor.author김해리-
dc.contributor.author이진우-
dc.contributor.author이광렬-
dc.date.accessioned2024-01-12T15:03:48Z-
dc.date.available2024-01-12T15:03:48Z-
dc.date.issued2015-03-06-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/89845-
dc.title실리콘 함유 다이아몬드상 카본 박막, 그 제조방법 및 용도-
dc.typePatent-
dc.date.registration2015-03-06-
dc.date.application2010-06-15-
dc.identifier.patentRegistrationNumber5706330-
dc.identifier.patentApplicationNumber2011-535501-
dc.publisher.countryJA-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2010
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