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dc.contributor.author백영준-
dc.contributor.author김원목-
dc.contributor.author이경석-
dc.contributor.author이택성-
dc.contributor.author정증현-
dc.contributor.author이수연-
dc.contributor.author박종극-
dc.date.accessioned2024-01-12T15:30:53Z-
dc.date.available2024-01-12T15:30:53Z-
dc.date.issued2012-08-21-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/90163-
dc.title박막 성장방법-
dc.typePatent-
dc.date.registration2012-08-21-
dc.date.application2009-04-02-
dc.identifier.patentRegistrationNumber8,247,031-
dc.identifier.patentApplicationNumber12/417,231-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2009
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