식각 선택비가 큰 버퍼층을 이용한 자기정렬 강유전체 게이트 트랜지스터의 제조방법

Author
김용태김성일김영환심선일김춘근
Assignee
한국과학기술연구원
Regitration Date
2006-12-19
Registration No.
7151001
Application Date
2004-08-23
Application No.
10/922949
Country
US
URI
https://pubs.kist.re.kr/handle/201004/90393
Appears in Collections:
KIST Patent > 2004
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