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dc.contributor.authorKim Yong Soo-
dc.contributor.authorPark June-
dc.contributor.authorKim Younghee-
dc.contributor.author성하민-
dc.contributor.author김점술-
dc.contributor.author이승범-
dc.contributor.author조현우-
dc.contributor.authorCho, Woon Jo-
dc.contributor.authorKim, Yong Tae-
dc.contributor.author이주한-
dc.contributor.authorJhon, Young Min-
dc.date.accessioned2024-01-12T15:34:44Z-
dc.date.available2024-01-12T15:34:44Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/90469-
dc.languageEnglish-
dc.subjectEUV-
dc.subjectHHG-
dc.subjectNonlinear-
dc.titleCharacteristic Analysis of Coherent EUV Light Source based on High-order Harmonic Generation-
dc.title.alternative고차조화파 생성 기반의 극자외선 광원 특성 분석-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation차세대 리소그래피 학술대회, v.F2-II-1, pp.44 - 45-
dc.citation.title차세대 리소그래피 학술대회-
dc.citation.volumeF2-II-1-
dc.citation.startPage44-
dc.citation.endPage45-
dc.citation.conferencePlaceKO-
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