DSpace at KISTKIST PatentOthers

Full metadata record

DC Field Value Language
dc.contributor.author김용태-
dc.contributor.author민석기-
dc.date.accessioned2024-01-12T16:02:11Z-
dc.date.available2024-01-12T16:02:11Z-
dc.date.issued1995-01-20-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/90888-
dc.title플라즈마　화학중착법에　의한　텅스텐　박막　증착방법-
dc.typePatent-
dc.date.registration1995-01-20-
dc.date.application1991-07-09-
dc.identifier.patentRegistrationNumber81643-
dc.identifier.patentApplicationNumber91-11618-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
Appears in Collections:
KIST Patent > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE