고분자 기판 위의 인듐산화물 또는 인듐주석산화물 박막증착 방법

Author
고석근조준식백영환한영건
Assignee
한국과학기술연구원
Regitration Date
2002-05-01
Registration No.
336621
Application Date
2000-02-15
Application No.
2000-0007024
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/91355
Appears in Collections:
KIST Patent > 2000
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