The effects of various bottom electrodes in MFM structure on the ferroelectric properties of SrBi2Nb2O9 thin films using RF magnetron sputtering

Title
The effects of various bottom electrodes in MFM structure on the ferroelectric properties of SrBi2Nb2O9 thin films using RF magnetron sputtering
Authors
최훈상이종한임건식강민정최인훈김용태김성일
Keywords
기판전극; MFM구조; 강유전체; SBT박막; 잔류분극
Issue Date
2002-07
Publisher
Joint International Plasma Symposium of 6th APCPST, 15th SPSM, OS 2002 & 11th KAPRA
Citation
, 427-427
URI
http://pubs.kist.re.kr/handle/201004/9167
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE