Growth of SiC nanorod using tetramethylsilane

Title
Growth of SiC nanorod using tetramethylsilane
Authors
노대호김재수변동진양재웅김나리
Keywords
SiC nanorod; SiC; spin coating; tetramethylsilane; CVD
Issue Date
2003-07
Publisher
한국재료학회지; Korean Journal of Materials Research
Citation
VOL 13, NO 6, 404-408
URI
http://pubs.kist.re.kr/handle/201004/9185
Appears in Collections:
KIST Publication > Article
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