상호 확산을 사용한 반도체 소자 및 이를 제조하는 방법

Author
김형준김상현임형락김성광김한성
Assignee
한국과학기술연구원
Regitration Date
2021-01-05
Registration No.
10886161
Application Date
2019-02-22
Application No.
16/282299
Country
US
URI
https://pubs.kist.re.kr/handle/201004/91884
Appears in Collections:
KIST Patent > 2019
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