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수평 배열된 반도체 채널을 가지는 반도체 소자 및 이의 제조 방법

Author

김형준; 심재필; 김상현

Assignee

한국과학기술연구원

Regitration Date

2019-10-14

Registration No.

10-2034175

Application Date

2017-05-30

Application No.

2017-0066818

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/91950

Appears in Collections:

KIST Patent > 2017

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