다공질 실리콘을 이용한 전계 방출 소자

Title
다공질 실리콘을 이용한 전계 방출 소자
Authors
주병권
Keywords
porous polysilicon; anodization; Field emission; turn-on voltage
Issue Date
2002-05
Publisher
마이크로 전자 및 패키징학회 춘계 기술 심포지움
Citation
, 92-97
URI
http://pubs.kist.re.kr/handle/201004/9207
Appears in Collections:
KIST Publication > Conference Paper
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