Alicyclic polymers based on t-BOC norbornene derivatives and maleic anhydride for applications as ArF photoresists

Title
Alicyclic polymers based on t-BOC norbornene derivatives and maleic anhydride for applications as ArF photoresists
Authors
안광덕
Issue Date
1999-06
Publisher
2nd Asian Photochemistry Conference
Citation
, 103-104
URI
http://pubs.kist.re.kr/handle/201004/9218
Appears in Collections:
KIST Publication > Conference Paper
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