Fabrication of horn shape antenna array using SU-8 & application to the bolometer

Title
Fabrication of horn shape antenna array using SU-8 & application to the bolometer
Authors
심태석문성욱황성우채경수오명환
Keywords
antenna; bolometer; antenna coupled bolometer; SU-8; lithography; thick PR
Issue Date
2000-11
Publisher
Proceedings of SPIE-Micromachining and Microfabrication Process Technology VI
Citation
VOL 4174, 496-507
URI
http://pubs.kist.re.kr/handle/201004/9225
ISSN
0277-786X
Appears in Collections:
KIST Publication > Conference Paper
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