구리배선의 electromigration 신뢰성

Title
구리배선의 electromigration 신뢰성
Authors
박영준
Keywords
Cu interconnects; electromigration; reliability
Issue Date
2001-10
Publisher
재료마당
Citation
v. 14, no. 6, 14-25
URI
http://pubs.kist.re.kr/handle/201004/9233
Appears in Collections:
KIST Publication > ETC
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