Fabrication of microbolometer using MEMS technology

Title
Fabrication of microbolometer using MEMS technology
Authors
강호관김민철하원호문성욱오명환김도훈
Keywords
MEMS; microbolometer; surface micromachining; SiNx; VOx
Issue Date
1999-11
Publisher
적외선 영상센서 Conference
Citation
VOL 10, 70-75
URI
http://pubs.kist.re.kr/handle/201004/9255
Appears in Collections:
KIST Publication > Conference Paper
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