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dc.contributor.author강호관-
dc.contributor.author김민철-
dc.contributor.author하원호-
dc.contributor.author문성욱-
dc.contributor.author오명환-
dc.contributor.author김도훈-
dc.date.accessioned2015-12-02T03:13:00Z-
dc.date.available2015-12-02T03:13:00Z-
dc.date.issued199911-
dc.identifier.citationVOL 10, 70-75-
dc.identifier.other10584-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/9255-
dc.publisher적외선 영상센서 Conference-
dc.subjectMEMS-
dc.subjectmicrobolometer-
dc.subjectsurface micromachining-
dc.subjectSiNx-
dc.subjectVOx-
dc.titleFabrication of microbolometer using MEMS technology-
dc.typeConference Paper-
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