반응성 스퍼터링법으로 제조한 다공성 산화물 복합체 박막 전극

Author
김주선권은석유영창최선희
Assignee
한국과학기술연구원
Regitration Date
2014-09-26
Registration No.
1447023
Application Date
2012-11-02
Application No.
2012-0123796
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/92590
Appears in Collections:
KIST Patent > 2012
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