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전자싸이크로트론 플라즈마 화학증착법에 의해 제조된 산화아연주석복합계 투명도전 복합막의 제조방법

Author

이중기; 조병원; 박지훈; 우주만; 장원영

Assignee

한국과학기술연구원

Regitration Date

2012-05-29

Registration No.

10-1152621

Application Date

2009-07-08

Application No.

2009-0062238

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/93080

Appears in Collections:

KIST Patent > 2009

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