DSpace at KISTKIST Patent2007

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dc.contributor.author이욱성-
dc.contributor.author백영준-
dc.contributor.author정증현-
dc.contributor.author황규원-
dc.contributor.author박종극-
dc.date.accessioned2024-01-12T18:01:49Z-
dc.date.available2024-01-12T18:01:49Z-
dc.date.issued2015-03-10-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/93106-
dc.title플라스마 증착장치 및 방법-
dc.typePatent-
dc.date.registration2015-03-10-
dc.date.application2007-12-10-
dc.identifier.patentRegistrationNumber8,973,526-
dc.identifier.patentApplicationNumber11/953,348-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2007
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