PECVD 법으로 형성한 W//6//7N//3//3/GaAs 구조의 열적 특성 .

Title
PECVD 법으로 형성한 W//6//7N//3//3/GaAs 구조의 열적 특성 .
Authors
김용태민석기홍종성이세정이창우이종무
Issue Date
1993-01
Publisher
한국재료학회지
Citation
v. 3, 443-450
URI
http://pubs.kist.re.kr/handle/201004/9349
Appears in Collections:
KIST Publication > Article
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