Atomic force microscopic observation in the surface morphologies and roughness of plasma deposited tungsten and tungsten nitride thin films.

Title
Atomic force microscopic observation in the surface morphologies and roughness of plasma deposited tungsten and tungsten nitride thin films.
Authors
김용태C. S. KwonI. H. ChoiC. W. Lee민석기
Issue Date
1993-01
Publisher
한국물리학회 제 67 회 학술논문 발표회
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/9353
Appears in Collections:
KIST Publication > ETC
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