식각 선택비가 큰 버퍼층을 이용한 자기정렬 강유전체 게이트 트랜지스터의 제조방법

Author
김용태김성일김영환심선일김춘근
Assignee
한국과학기술연구원
Regitration Date
2006-01-09
Registration No.
0543528
Application Date
2003-08-26
Application No.
2003-0059188
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/93534
Appears in Collections:
KIST Patent > 2003
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