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dc.contributor.author김병규-
dc.contributor.author강현재-
dc.contributor.author남궁영우-
dc.date.accessioned2024-01-12T18:30:23Z-
dc.date.available2024-01-12T18:30:23Z-
dc.date.issued2006-01-18-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/93549-
dc.title하이브리드 타입 미세조작방법 및 그 시스템-
dc.typePatent-
dc.date.registration2006-01-18-
dc.date.application2003-11-24-
dc.identifier.patentRegistrationNumber0545962-
dc.identifier.patentApplicationNumber2003-0083705-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2003
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