Short consideration on the non-uniformities existing at the etched-edges in deep anisotropic etching of (100) silicon

Title
Short consideration on the non-uniformities existing at the etched-edges in deep anisotropic etching of (100) silicon
Authors
주병권하병주김철주오명환차균현
Keywords
MEMS; micromachining; deep silicon etching; diaphragm
Issue Date
1992-01
Publisher
한국재료학회지; Korean Journal of Materials Research
Citation
VOL 2, NO 5, 383-386
URI
http://pubs.kist.re.kr/handle/201004/9358
ISSN
1225-0562
Appears in Collections:
KIST Publication > Article
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