Effect of excess oxygen on the properties of reactive sputtered RuO//x thin films.

Title
Effect of excess oxygen on the properties of reactive sputtered RuO//x thin films.
Authors
김용태이정건조성호민석기
Issue Date
1995-01
Publisher
J. appl. phys.
Citation
v. 77, 5473-5475
URI
http://pubs.kist.re.kr/handle/201004/9374
Appears in Collections:
KIST Publication > Article
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