Crystallization of amorphous silicon by excimer laser annealing with a line shape beam having a gaussian profile

Title
Crystallization of amorphous silicon by excimer laser annealing with a line shape beam having a gaussian profile
Authors
김동환최상삼주홍전영민
Keywords
laser-induced crystallization
Issue Date
1994-10
Publisher
Japanese Journal of Applied Physics, Part 2 - Letters
Citation
v. 33, no. 10B, L1438-L1441
URI
http://pubs.kist.re.kr/handle/201004/9380
ISSN
0021-4922
Appears in Collections:
KIST Publication > Article
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