KIST Library Institutional Repository

램프가열　및　회전식기판을　이용한　박막제조방법　및　장치

Author

이창우; 김용태

Assignee

한국과학기술연구원

Regitration Date

1997-07-02

Registration No.

117421

Application Date

1993-12-21

Application No.

93-28840

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/93820

Appears in Collections:

KIST Patent > Others

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