The optical and electrical characteristics of a-Si:H films prepared by ECR CVD

Title
The optical and electrical characteristics of a-Si:H films prepared by ECR CVD
Authors
전법주강문상임태훈오인환
Issue Date
1996-01
Publisher
IEEE conference on optoelectronic and microelectronic materials and devices, Canberra, Australia
URI
http://pubs.kist.re.kr/handle/201004/9391
Appears in Collections:
KIST Publication > Conference Paper
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