이온빔을 이용한 재료의 표면 처리 장치

Author
고석근조정최원국정형진
Assignee
한국과학기술연구원
Regitration Date
2001-11-20
Registration No.
6,319,326
Application Date
2000-08-07
Application No.
09/555,832
Country
US
URI
https://pubs.kist.re.kr/handle/201004/94145
Appears in Collections:
KIST Patent > 2000
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